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Semiconductor parts
Valve and Pump Parts
For high functional parts used in valves and pumps which are indispensable to semiconductor manufacturing equipment, we are committed to provide reliable and satisfactory quality utilizing our experience and technology in processing accumulated over years for general purpose parts as well as for stack valve bodies, diaphragms and bellows.
Joints, Fittings and Other Parts
We can produce stack manifolds and various plumbing parts of more complicated shape to be used for supplying chemicals in semiconductor manufacturing equipment. For essential parts that determine the performance of equipment such as nozzles, highly precise and stable production and supply can be achieved with our hole drilling and thin wall processing technology.
Springs (Coating and Cutting)
Chemically resistant springs are used in manufacturing semiconductors. We can propose technical plans that meet customer’s needs such as stainless steel springs coated with PFA, a corrosion resistant fluororesin, and the manufacturing of springs from raw materials.
Processing technology
